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Photo-Mask Equipment

 

Mask integrity plays a greater part in the success of advanced lithographic processing. SUSS MicrocTec offers the automated equipment that meets the next-generation lithography roadmap requirements for photomask cleaning, baking and developing processing. Its innovative solutions meet the most stringent conditions of 193i 1x nm half-pitch DPT, extreme-ultraviolet lithography (EUVL) and nanoimprint lithography (NIL) processing with the aim of maximizing the photomask performance.

 

MaskTrack Pro Series

MaskTrack Pro Series

 

MaskTrack Pro is extendable to allow tool clustering with third-party products and offers a general approach to storage, handling and processing of the mask in a fully-controlled and ultra-clean environment. Its modular platform guarantees maximum flexibility and customization. Since its high throughput brings the best cleaning result, MaskTrack Pro has been accepted as the platform of choice in the industry.

 

 

ASX Seriess

ASX Series

 

SUSS MicroTec ASx series offers the advanced baking, developing, and cleaning methods for 250nm to 65nm technology nodes and photomask processing. This platform offers reliability, stability and high performance to meet the requirements for defect-free processing of masks exposed to 248nm and 193nm lithography.

 

 

HMX Series

HMX Series

 

Because of its developing, etching and cleaning functionalities, HMxSquare is designed to address the needs of customers in the semiconductor industry requiring high quality substrate processing for photomask applications as well as opto-electronics, OLED, and special semiconductor back-end (MEMS) applications. It also enables processing of small series or pilot production of special substrate by loading manually. HMxSquare enables the electronic control functions and new cleaning techniques through stability and reliability of the proven performance of the original HMx series platform. Thus, it contributes to the protection of the environment and meets the requirements for industrial safety.

 

 

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