Mask Aligner
SUSS MicroTec Mask Aligners, which have optimally sophisticated exposure optics for applications with thick and thin resists, sport the highest alignment precision. SUSS MicroTec offers a complete range of mask aligners for high-end fab automation, high volume production and R&D environments as well. SUSS MicroTec Mask Aligners are used for lithography applications especially in the fields of MEMS, advanced packaging, 3D packaging, compound semiconductors, power devices, photovoltaics, nanotechnology and wafer-level optics.